Effect of the vacuum on Structural and Morphological Properties of Ga2O3 NPs Thin Films by (PLD) Technique

Abstract

In this study, thin films of Gallium oxide nanoparticles were equipped using the method of ‎pulsed laser deposition (PLD)on a glass substrate under different vacuum conditions (5×10-5, 2×10-2, and ‎‎1mbar). The Nd-YAG laser was utilized at a wavelength of 1064 nm and a frequency ‎‎of 5 Hz at 130 0C. The increase effect of the vacuum value on the optical and structural ‎characteristics was studied by UV-VIS, X-ray diffraction )XRD), scanning electron ‎microscopy (SEM), and Photoluminescence properties (PL). The outcomes XRD showed that the ‎structure of Ga2O3 nanoparticles is a polycrystalline structure of the monoclinic type, with Prominent ‎crystal orientations of (001), (201), (400), (-202), (111), and (-112). It is according to JCPDS card ‎No.00-041-1103. Crystallite size for the complete model decreased with the growth of the vacuum ‎value. The (SEM) images showed that Ga2o3 nanoparticles are spherical and ‎homogeneous. The energy band gap increased with increasing the vacuum, and the absorption ‎upper was in the UV zone. ‎Similar results were obtained from the researcher MA Yan-Mei et al. [1].